描述
若波动数据工艺上彼此并无直接影响,则可能为微机某卡件发生故障,立即将相关自调系统打到手动调节,必要时到现场进行调节,同时,通知微机及仪表人员检查。
ARVOO Picasso Compact-CL CPCI-CL Rev.B
Tencor instruments 4 Chan. motor control assy 184586
Jeol PH01134-1 AL-X use on Jeol 5900 Lab6 SEM
Tencor instruments flat finder controller 264865
Applied materials mini AI/AO BD assy 0100-09022 rev. G
Festo E.CNT-10
Tencor instruments 4 chan. motor control 186481 Rev. B1
NSK ESA-LYA1A13-11