KRC2/VKRC2 KUKA

Smart Applications:Predictive Maintenance PdM

Based on FDC output data,yield data and measurement data,a prediction model is developed using MVA technology,and the estimated time to failure(MTTF)range and prediction reliability are obtained according to the predicted failure time.Make a response plan in advance to reduce the risk of unplanned downtime and wafer injury.

智能应用：预测性维护PdM

基于FDC输出数据，良率数据以及量测数据，利用MVA技术开发预测模型，根据预测故障发生时间，获得估计的故障发生时间(MTTF)范围和预测的可信度。提前做出应对计划，减少计划外downtime以及wafer损伤风险。