Description
如供电或通信线路的影响，过程通道的保险损坏，机柜电源不正常等。模件底座通信回路出故障。元器件老化或损坏，模件处于长时间工作导致的损坏。对于以上故障只有在出现故障时尽力修复，但前提是要有备品备件来保障。
Thermcraft 4″ Tube Furnace w/ Controller, Quartz Tube
RUCKER & KOLLS 1032 AUTOPROBER STATION CASCADE 54 R&K
TEL ACT 8 Low Temp Hot Plate Process Station (LHP)
Tokyo Electron ACT 8 Chill Plate Process Station (CPL)
TEL ACT 8 Chilling Hot Plate Process Station (CHP)
Proforma 300 Non-Contact Wafer Thickness Gage
