KPS-600/20-ESC KUKA

Based on Jiyun Industrial Internet of Things platform and industrial big data platform,it provides equipment status management,equipment monitoring,equipment alarm,recipe management,process management,process analysis and other applications for various semiconductor equipment,helping to achieve 3000 points/second/machine Taiwan sea Write and query volume data,real-time monitoring of key process indicators,cluster management of multiple devices,fault detection and classification,and stability control of key output indicators.

基于寄云工业物联网平台和工业大数据平台，为多种半导体装备提供设备状态管理，设备监控，设备告警，配方管理，制程管理，制程分析等应用，帮助实现了3000点/秒/机台海量数据的写入和查询，关键工艺指标的实时监测，多台设备的集群管理，以及故障检测与分类、关键输出指标的稳定性控制等。