KSD1-16 KUKA

Smart Applications:Smart Recipe Optimization ROS

Accelerate recipe development,reduce variability and widen process windows through artificial intelligence algorithms that can be used to optimize individual chambers and entire equipment,automatically modify recipe parameters or select control parameters based on predictions of results,improving process performance and production efficiency.

智能应用：智能配方优化ROS

通过人工智能算法加快配方开发速度，减少可变性并拓宽工艺窗口，可用于优化单个腔室和整个设备，根据对结果的预测自动修改配方参数或选择控制参数，提高加工性能和生产效率。