BG10 LENZE

In the semiconductor industry,the Advanced Group Controller(AGC)of NAURA’s equipment cluster management system uses the Jiyun Industrial Internet solution platform suite to provide the whole-process integrated data service capability,forming functions including equipment status monitoring,configuration management,and process analysis,etc.Realize high-performance real-time data acquisition of semiconductor equipment,and effectively realize abnormal detection of key control indicators and online stability control of key output indicators.As a completely independent research and development software with independent intellectual property rights,the research and development of AGC software enables NAURA’s semiconductor production equipment to have the same cluster management software as foreign competitors,which further enhances the competitiveness of the products.

在半导体行业，北方华创设备集群管理系统Advanced Group Controller（AGC）运用寄云工业互联网解决方案平台套件，提供全流程一体化数据服务能力，形成包括设备状态监控，配置管理，制程分析等功能，实现半导体装备的高性能实时数据采集，并有效实现关键控制指标的异常检测以及关键输出指标的在线稳定性控制。作为完全自主研发，拥有自主知识产权的软件，AGC软件的研发使得北方华创的半导体生产设备具备和国外竞争厂商同等的集群管理软件，进一步提升了产品的竞争力。