In recent years,micro-satellites,micro-aircraft and micro-robots that use MEMS technology have shown attractive application prospects and strategic significance for both military and civilian use.Many countries represented by Japan(Mitsubishi Electronics Corporation,Panasonic Tokyo Research Institute and Sumitomo Electronics Corporation,etc.)have carried out a lot of research in this area,focusing on the development of micro-robots that enter the narrow space of industry,medical micro-systems and micro-factories that enter the narrow space of the human body.
近年来,采用MEMS技术的微型卫星、微型飞行器和进入狭窄空间的微机器人展示了诱人的应用前景和军民两用的战略意义。以日本(三菱电子公司、松下东京研究所和Sumitomo电子公司等)为代表的许多国家在这方面开展了大量研究,重点发展进入工业狭窄空间微机器人、进入人体狭窄空间医疗微系统和微型工厂。
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