Micro-robots are small in size,precise in devices,and can perform micro operations.They have the characteristics of small inertia,fast response,high resonant frequency,and high added value.However,microrobots are not the miniaturization of ordinary robots in a simple sense,but a unit that integrates sensing,control,execution and energy.Moreover,the establishment of micro-robots requires smaller drivers,actuators,sensors,processors,etc.,and the processing and development of micro-robot micro-components will be conducive to the realization of higher-level micro-system integration.However,the traditional processing technology is far from meeting the processing needs of these tiny parts,so researchers have gradually shifted their attention to the very popular additive manufacturing process in recent years.Additive manufacturing,also known as 3D printing technology,abandons the traditional process of complex,high cost and difficulty,and can quickly and flexibly design various complex structures.And high-precision micro-nano 3D printing technology has become an indispensable means of micro-robots.
微型机器人结构尺寸微小,器件精密,可进行微细操作,具有小惯性、快速响应、高谐振频率、高附加值等特点。然而微型机器人并不是简单意义上普通机器人的微小化,而是集成有传感、控制、执行和能量的单元,是机械、电子、材料、控制、计算机和生物医学等多学科技术的交叉融合。而且建立微型机器人需要更为微小的驱动器、执行器、传感器、处理器等,由此展开的对微型机器人微部件的加工和研制,将有利于实现更高意义上的微系统集成。然而,传统的加工工艺远远满足不了这些微小部件加工需求,因此研究人员将目光逐步转移到近些年来非常火热的增材制造工艺。增材制造又称3D打印技术,它摒弃了传统加工工艺过程复杂、成本高、难度大等特点,能够快速、灵活设计各种复杂结构。而高精密微纳3D打印技术又成为微型机器人不可或缺的手段。
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