Description
整定PID参数时,一定要力求工况稳定,尤其是衰减曲线法整定PID,否则工艺中的其他干扰进入系统,就不能得到正确的4:1~10:1衰减比例度和衰减周期,就不能求得最佳PID参数。
Seiko Seiki STP-301CB1 Turbo Pump & SCU-21D controller
ADVANCED ENERGY RFG-1250 HALO
DPS II RF Source Matching Network (0190-15168)
ADVANCED ENERGY PDW 2200 AE PDW 2200 LAM 660-015516-014
COMDEL CPS1001S 13.56mhz RF GENERATOR P/N 0190-70099
COMDEL CLX-2500 RF GENERATOR
COMDEL CLX2500 RF GENERATOR PART # FP1335R4
ADVANCED ENERGY PDW 2200 AE 3156011 Lam 853-015516-002
COMDEL CX1250S RF POWER SUPPLY