描述
DCS分为三大部分，带I/O板的控制器、通讯网络和人机界面（hmi）。由I/O板通过端子板直接与生产过程相连，读取传感器来的信号。I/O板有几种不同的类型，每一种I/O板都有相应的端子板。
CTI CRYOGENIC PUMP CRYO TORR 8/8033179 – REFURBISHED
Cryo-Torr 10 Cryopump High Vacuum Pump Helix / Refurb
Becker 5 HP KVT3.100 vacuum pump KVT 3.100 KVT-3.100
C&M Vacuum Pump w/ 5 HP Baldor Motor VM3615T
Republic Regenerative Blower HRB1100 ring side channel
Up to 706 cfm and 67″H2O (Pressure) or 71″H2O(Vacuum)
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Roots Vacuum Pump FRU180 NIB
