Description
若部分操作站突然无显示，则说明UPS或市电断电，立即通知微机维修工进行维修。若有电的操作站可正常监控，此时不会影响控制系统的正常调节。
Blue M Oven Model CR07-256B/C
AMAT Applied Materials 13″ Treatment Shield Endura
AMAT Applied Materials 8″ Treatment Shield 0010-20127
Furon Chempure Pump P/N 3000539 M/N CDP0750
Altman Browning Process Tube Loader
Focus / Deflector Power Supply Ion Implanter
Process Monitor Cooling Water Flow Monitor PM-102
Leybold WA1000 Vacuum Pump
Cybor Photo Resist Pump Model 5116C w/ Filter System
Leybold 100E CVD DRY VAC Vacuum Pump
