描述
由于所有控制站设备均为双路供电,一路UPS,一路市电,所以这种情况的发生几率很小。
当控制站全部断电后,监控画面上两个系统报警红灯亮,通讯中断,数据全部不刷新,所有自调系统完全失控,
调节阀将恢复到初始状态,气开阀全关,气关阀全开。此时,应立即紧急处理或停车,同时到现场进行操作。
Blue M Oven Model CR07-256B/C
AMAT Applied Materials 13″ Treatment Shield Endura
AMAT Applied Materials 8″ Treatment Shield 0010-20127
Furon Chempure Pump P/N 3000539 M/N CDP0750
Altman Browning Process Tube Loader
Focus / Deflector Power Supply Ion Implanter
Process Monitor Cooling Water Flow Monitor PM-102
Leybold WA1000 Vacuum Pump
Cybor Photo Resist Pump Model 5116C w/ Filter System
Leybold 100E CVD DRY VAC Vacuum Pump