Description
经过对该dcs信号点排查,最后只剩下由变频器送至dcs的信号线最值得怀疑。为证实干扰源是由变频器产生,我们将该变频器的出线电缆从铁氧体环中穿过,并将变频器至dcs的信号线与变频器的输入、输出线尽量远离并交叉。通过以上措施,dcs上该点的oop报警频率有一定程度下降。这就证实了干扰源来自变频器。那么下一步的措施就是尽量减少变频器的干扰。
Cylindrical Stainless Steel High Vacuum Chamber, 26″ OD
Stainless Steel Top Plate for Perkin-Elmer 2400/4400
Large Rectangular OFHC Copper Backing Plate
MKS Spectra vacuum controller LM59, lot’s of 3
Mactronix Eureka UKA-650 Wafer Transfer Station
TJA Solutions Spray Chamber Supply 4600001 VG Elemental
VG Elemental