Description
DCS分为三大部分，带I/O板的控制器、通讯网络和人机界面（hmi）。由I/O板通过端子板直接与生产过程相连，读取传感器来的信号。I/O板有几种不同的类型，每一种I/O板都有相应的端子板。
ERSASCOPE stage only type: VSXY 100
Spectra tech motorized micropositioning stage & stage
Tektronix AM 503B current probe amplifier
Tencor ADC-PFE interface S76 assy 244163 rev. B
Etrali SIM236
Agilent 5517B HeNe laser 360uW
HP 8116A pulse/function generator 50MHz Opt: 1*001
NECSY CPU 0 card
MPC-T0059A-11 BOARD IO MTR #03A TOB1059A
