Description
控制系统的硬件一定要具有高可靠性，在电子元器件上的生产工艺各环节上采用了成熟技术,电子模件最好能热拔插。控制器的运算和存储能力要足够，IO卡件具有很强的抗干扰能力。
Silicon Valley Group 88 Series Robot S.V.G.
Silicon Valley Group SVG Track Module 88 Series
Asyst Fan / Filter Assembly P/N C0094-0948
Spin Rinse Dryer Semitool 270 Part
Ebara Vacuum Pump Model 50X20
Optical Sensor Interface Board AII-CPU-03 9ECU-101A
Osaka Vacuum Ltd. Heater Controller REX-C100
Filter Pump Industries Model PM-1/2 RPM 1/2 HP – USED
Quiet Chuck DC Controller 490 w/ Athena Controller
