Description
冷却风扇故障导致主机过热,或负荷过重造成。可首先检查主机本身的温升情况,其次用替代法检查硬盘、主机卡件等,以确定故障部分。
MASS FLOW CONTROLLER UNIT UFC-1200A Gas:CF4 100Sccm
MASS FLOW CONTROLLER UNIT UFC-1400A Gas:N2 Range:10Sccm
MASS FLOW CONTROLLER UNIT UFC-1400A Gas:N2 500Sccm
MASS FLOW CONTROLLER UNIT UFC-1400 Gas:N2 Range:1SLM
MASS FLOW CONTROLLER UNIT UFC-1401A Gas:N2 Range:10Sccm