描述
控制系统的硬件一定要具有高可靠性,在电子元器件上的生产工艺各环节上采用了成熟技术,电子模件最好能热拔插。控制器的运算和存储能力要足够,IO卡件具有很强的抗干扰能力。
Rebuilt Roots “PD” Blower – 47 URAI-DSL – Left Bottom
Rebuilt Roots Universal RAI Blower
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Vacuubrand MD4C Diaphragm Vacuum Pump
Pfeiffer Vacuum Turbopump TPU 330 untested
Edwards Vacuum Pump Blower QMB500 untested, parts
Ebara Vacuum Turbopump ET300W working